JPS6440089U - - Google Patents

Info

Publication number
JPS6440089U
JPS6440089U JP1987135114U JP13511487U JPS6440089U JP S6440089 U JPS6440089 U JP S6440089U JP 1987135114 U JP1987135114 U JP 1987135114U JP 13511487 U JP13511487 U JP 13511487U JP S6440089 U JPS6440089 U JP S6440089U
Authority
JP
Japan
Prior art keywords
fixed part
elastic hinge
thin flexible
arm
movable section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987135114U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543439Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987135114U priority Critical patent/JPH0543439Y2/ja
Publication of JPS6440089U publication Critical patent/JPS6440089U/ja
Application granted granted Critical
Publication of JPH0543439Y2 publication Critical patent/JPH0543439Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP1987135114U 1987-09-03 1987-09-03 Expired - Lifetime JPH0543439Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987135114U JPH0543439Y2 (en]) 1987-09-03 1987-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987135114U JPH0543439Y2 (en]) 1987-09-03 1987-09-03

Publications (2)

Publication Number Publication Date
JPS6440089U true JPS6440089U (en]) 1989-03-09
JPH0543439Y2 JPH0543439Y2 (en]) 1993-11-01

Family

ID=31394458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987135114U Expired - Lifetime JPH0543439Y2 (en]) 1987-09-03 1987-09-03

Country Status (1)

Country Link
JP (1) JPH0543439Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007040537A (ja) * 2002-09-30 2007-02-15 Asml Netherlands Bv リソグラフィ投影装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007040537A (ja) * 2002-09-30 2007-02-15 Asml Netherlands Bv リソグラフィ投影装置
US7239369B2 (en) 2002-09-30 2007-07-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7417711B2 (en) 2002-09-30 2008-08-26 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
JPH0543439Y2 (en]) 1993-11-01

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